86164656_0021 2 62.4725/999.56(37539584) 16
86164656_0021p.dat 516x2 4096(0)/NU 12 2048 0 10974 0 Pleth
86164656_0021r.dat 516 1637(1230)/Ohm 12 2048 0 65489 0 Resp