86164656_0063 2 62.4725/999.56(53458688) 272
86164656_0063p.dat 516x2 4096(0)/NU 12 2048 0 20369 0 Pleth
86164656_0063r.dat 516 1637(1230)/Ohm 11 1024 0 8136 0 Resp