86164656_0069 2 62.4725/999.56(62969600) 80 86164656_0069p.dat 516x2 4096(0)/NU 12 2048 0 7960 0 Pleth 86164656_0069r.dat 516 1637(1230)/Ohm 12 2048 0 4182 0 Resp